Name of the Equipment | UV Exposure System |
Group | Crystalline Silicon Solar Cells |
Category | litho/analytical |
Operator | Guru Burkul |
System Owner | Guru Burkul guruburkul@iitb.ac.in |
| Make / Model | Kemi Moosa/KUVC-2 |
| Information | No |
| Serial Number | NA |
| FootPrint | 50 cm X 30 cm |
| InstallationDate | 01/07/2014 |
| Equipment Type | Miscellaneous |
| Location | NCPRE Char lab (3rd Floor, NanoE Building) |
| AMC | Not Required |
| Local Dealer | NA NA |
| Actual Dealer | Kemi Moosa moideenkemi@gmail.com |
| SOP | SOP/71_SOP.pdf |
| Training & other policy documents | POLICY/71_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/71_GLIMPSE.pdf |
| Tool Facilities Requirements | NA |
| Access | Open |
| Lab Phone No | 3585 |
| Substrate allowed | Any |
| Substrate Dimension | small pieces to 6 inch wafer |
| Chemical allowed | NA, Any |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | NA |